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Radial dependence diagnosis of inductively coupled Ar plasma based upon optical emission spectroscopic measurement with spectral reflectance compensation

Yuya Yamashita, Kenta Doi, Tetsuji Kiyota, Keiichiro Asakawa, Sotaro Hosoya, Wataru Kikuchi, Atsushi Nezu, Hiroshi Akatsuka2023年Review of Scientific InstrumentsIF 1.6 出版社

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