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Anomalous plasma evolution in the erosion process in high-power reactive magnetron sputtering

Suihan Cui, Dongjie Yang, Shiyi Tang, Ziqi Ma, Mengran Xiao, Xiaokai An, Wei Lv, Wanli Luo, Qinfang Yu, Liangliang Liu, Ricky K. Y. Fu, Paul. K. Chu, Zhongzhen Wu2025年2月Physics of PlasmasIF 2.2 出版社

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