For high-frequency plasma investigation the method of atomic-beam probing of kilo-electron-volt energies is the most promising one. Reduction of the beams resulting from atomic interactions enables determination of the density of plasma components and their temperatures over a wide range of values.In this article probing of a helium plasma of a high-frequency pulsed discharge was performed with helium (8 and 15 keV) and argon (10 keV) beams, enabling determination of ion and neutral distribution in time, as well as electron temperature. The plasma parameters so obtained coincide satisfactorily with microwave and probe measurements.