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AI要約ありComputational study of the evolution of high-aspect-ratio SiO2 trench and hole features during physical sputteringAvailable to Purchase
Byeong-yeop Choi, Si-jun Kim, Won-nyoung Jeong, Chul-hee Cho, Young-seok Lee, In-ho Seong, Min-su Choi, Shin-jae You2026
AI要約あり