New diagnostic method for monitoring plasma reactor walls: Multiple total internal reflection Fourier transform infrared surface probe

Anna R. Godfrey, Saurabh J. Ullal, Linda B. Braly, Erik A. Edelberg, Vahid Vahedi, Eray S. Aydil2001年Review of Scientific InstrumentsIF 1.6 出版社

この論文にはまだAI要約がありません。