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Microwave plasma torch abatement ofNF3andSF6

Yong Cheol Hong, Han Sup Uhm, Byung Jun Chun, Sun Ku Lee, Sang Kyu Hwang, Dong Su Kim2006年Physics of PlasmasIF 2.2 出版社

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Microwave plasma torch abatement ofNF3andSF6 — 核融合論文 — FusionPapers