FusionPapers
図版検索トレンドwiki日本の研究
© 2026 FUSIONPAPERS
About法務情報
トップに戻る

Microwave plasma torch abatement ofNF3andSF6

Yong Cheol Hong, Han Sup Uhm, Byung Jun Chun, Sun Ku Lee, Sang Kyu Hwang, Dong Su Kim2006年Physics of PlasmasIF 2.2出版社
この論文にはまだAI要約がありません。

関連論文

Abatement ofCF4by atmospheric-pressure microwave plasma torch

2003Physics of Plasmas

Design of a fully automatic microwave plasma torch system

2019Review of Scientific Instruments

Abatement ofSF6andCF4using an enhanced kerosene microwave plasma burner

2006Physics of Plasmas

Properties of microwave plasma torch operating at a low pressure

2008Physics of Plasmas

Production of carbon nanotubes by microwave plasma torch at atmospheric pressure

2005Physics of Plasmas

Propagating modes of the travelling wave in a microwave plasma torch with metallic enclosure

2019Physics of Plasmas

Development of a new microwave plasma torch and its application to diamond synthesis

1989Review of Scientific Instruments

Disintegration of water molecules in a steam-plasma torch powered by microwaves

2007Physics of Plasmas

Characterization of an atmospheric pressure plasma generated by a plasma torch array

1998Physics of Plasmas

Experimental investigation on improving the efficiency of power coupling from the incident microwave to the discharge in a plasma torch

2020Physics of Plasmas