図版検索トレンド wiki 日本の研究

© 2026 FUSIONPAPERS

About 法務情報

トップに戻る

Experimental investigation of edge-to-center density ratio in inductively coupled plasmas

Gun-Ho Kim, Hyo-Chang Lee, Chin-Wook Chung2010年Physics of PlasmasIF 2.2 出版社

wiki

Inductively coupled plasma

この論文にはまだAI要約がありません。

関連論文

Experimental investigation of edge-to-center density ratio in E-H mode transition of an inductively coupled plasma

2017Physics of Plasmas

Global model for pulsed inductively coupled plasma sources: Effect of edge-to-center density ratio and electron heating

2020Physics of Plasmas

Experimental investigation on optimal plasma generation in inductively coupled plasma

2021Physics of Plasmas

Effects of aspect ratio on electron loss mechanisms and plasma uniformity in cylindrical inductively coupled plasma

2020Physics of Plasmas

Plasma parameters analysis of various mixed gas inductively coupled plasmas

2002Physics of Plasmas

Experimental investigation on plasma parameter profiles on a wafer level with reactor gap lengths in an inductively coupled plasma

2015Physics of Plasmas

Edge plasma properties in Heliotron-E

1992Nuclear Fusion

Effect of the RF bias on the plasma density in an argon inductively coupled plasma

2020Physics of Plasmas

Power dependence of electron density at various pressures in inductively coupled plasmas

2014Physics of Plasmas

Nonlinear enhancement of plasma density in linear combination of multiple collisional internal inductively coupled plasma sources

2010Physics of Plasmas