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Erratum: “The effects of neutral gas heating on H mode transition and maintenance currents in a 13.56 MHz planar coil inductively coupled plasma reactor” [Phys. Plasmas 19, 093501 (2012)]

Kanesh K. Jayapalan, Oi-Hoong Chin2012年Physics of PlasmasIF 2.2出版社

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Inductively coupled plasma
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