FusionPapers
図版検索トレンドwiki日本の研究
© 2026 FUSIONPAPERS
About法務情報
トップに戻る

E→H mode transition density and power in two types of inductively coupled plasma configuration

Jian Wang, Yin-chang Du, Xiao Zhang, Zhe Zheng, Yu Liu, Liang Xu, Pi Wang, Jin-xiang Cao2014年Physics of PlasmasIF 2.2出版社

wiki

Inductively coupled plasma
この論文にはまだAI要約がありません。

関連論文

On the E to H mode transition in a dual frequency (2 and 13.56 MHz) inductively coupled plasma

2020Physics of Plasmas

Power dependence of electron density at various pressures in inductively coupled plasmas

2014Physics of Plasmas

Evolution of the electron energy distribution and E-H mode transition in inductively coupled nitrogen plasma

2010Physics of Plasmas

Experimental investigation of edge-to-center density ratio in E-H mode transition of an inductively coupled plasma

2017Physics of Plasmas

Mode transition in CF4+  Ar inductively coupled plasma

2013Physics of Plasmas

Hysteresis and current reduction during E–H mode transition in an inductively coupled plasma

2020Physics of Plasmas

Equivalent circuit effects on mode transitions in H2inductively coupled plasmas

2015Physics of Plasmas

Experimental investigation on the reduction in antenna coil current during the E to H mode transition in an inductively coupled plasma

2019Physics of Plasmas

On the E to H and H to E transition mechanisms in inductively coupled plasma

2006Physics of Plasmas

Effect of RF bias power on discharge mode transition and its hysteresis in inductively coupled plasmas

2022Physics of Plasmas