図版検索トレンド wiki 日本の研究

© 2026 FUSIONPAPERS

About 法務情報

トップに戻る

Characterization of electron kinetics regime with electron energy probability functions in inductively coupled hydrogen plasmas

June Young Kim, Won-Hwi Cho, Jeong-Jeung Dang, Kyoung-Jae Chung, Y. S. Hwang2016年Physics of PlasmasIF 2.2 出版社

wiki

Hydrogen plasma

この論文にはまだAI要約がありません。

関連論文

Experimental measurements of spatial plasma potentials and electron energy distributions in inductively coupled plasma under weakly collisional and nonlocal electron kinetic regimes

2012Physics of Plasmas

Electron energy distribution functions in low-pressure inductively coupled bounded plasmas

2006Physics of Plasmas

Electron energy distributions in a magnetized inductively coupled plasma

2014Physics of Plasmas

Effect of antenna size on electron kinetics in inductively coupled plasmas

2013Physics of Plasmas

Transition of electron kinetics in weakly magnetized inductively coupled plasmas

2013Physics of Plasmas

Non-monotonic behavior of electron temperature in argon inductively coupled plasma and its analysis via novel electron mean energy equation

2018Physics of Plasmas

Experimental observation of electron bounce resonance through electron energy distribution measurement in a finite size inductively coupled plasma

2016Physics of Plasmas

Electron-assisted PR etching in oxygen inductively coupled plasma via a low-energy electron beam

2023Physics of Plasmas

Power dependence of electron density at various pressures in inductively coupled plasmas

2014Physics of Plasmas

Electron kinetics in low-temperature plasmas

2019Physics of Plasmas