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Striations in electronegative capacitively coupled radio-frequency plasmas: Effects of the pressure, voltage, and electrode gap

Yong-Xin Liu, Ihor Korolov, Edmund Schüngel, You-Nian Wang, Zoltán Donkó, Julian Schulze2017年Physics of PlasmasIF 2.2 出版社

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Capacitively coupled plasma

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