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Hybrid simulation of electron energy distributions and plasma characteristics in pulsed RF CCP sustained in Ar and SiH4/Ar discharges

Xi-Feng Wang, Wen-Zhu Jia, Yuan-Hong Song, Ying-Ying Zhang, Zhong-Ling Dai, You-Nian Wang2017年Physics of PlasmasIF 2.2 出版社

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