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A miniaturized ECR plasma flood gun for wafer charge neutralization

Yaoxiang Jiang, Shixiang Peng, Wenbin Wu, Tenghao Ma, Jingfeng Zhang, Haitao Ren, Kai Li, Tao Zhang, Jiamei Wen, Yuan Xu, AiLin Zhang, Jiang Sun, Zhiyu Guo, Jia’er Chen2020年Review of Scientific InstrumentsIF 1.6 出版社

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Electron cyclotron resonance

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