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Response to “Comment on ‘A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma’” [Phys. Plasmas28, 064701 (2021)]

Young-Cheol Kim, Hyun-Jun Kim, Hyo-Chang Lee, Chin-Wook Chung2021年Physics of PlasmasIF 2.2出版社

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Capacitively coupled plasma
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