FusionPapers
図版検索トレンドwiki日本の研究
© 2026 FUSIONPAPERS
About法務情報
トップに戻る

Direct implicit and explicit energy-conserving particle-in-cell methods for modeling of capacitively coupled plasma devices

Haomin Sun, Soham Banerjee, Sarveshwar Sharma, Andrew Tasman Powis, Alexander V. Khrabrov, Dmytro Sydorenko, Jian Chen, Igor D. Kaganovich2023年Physics of PlasmasIF 2.2出版社

wiki

Particle-in-cellCapacitively coupled plasma
この論文にはまだAI要約がありません。

関連論文

Publisher's Note: “Direct implicit and explicit energy-conserving particle-in-cell methods for modeling of capacitively coupled plasma devices” [Phys. Plasmas30, 103509 (2023)]

2024Physics of Plasmas

Accuracy of the explicit energy-conserving particle-in-cell method for under-resolved simulations of capacitively coupled plasma discharges

2024Physics of Plasmas

Verification of an energy-conserving semi-implicit electrostatic particle-in-cell scheme for modeling high-density plasma at scaleOpen Access

2026Physics of Plasmas

Uniformity of low-pressure capacitively coupled plasmas: Experiments and two-dimensional particle-in-cell simulations

2024Physics of Plasmas

Modeling the role of secondary electron emission in direct current magnetron sputtering using explicit energy-conserving particle-in-cell methodsOpen Access

2026Physics of Plasmas

Impact of particle number and cell size in fully implicit charge- and energy-conserving particle-in-cell schemesOpen Access

2025Physics of Plasmas

The method of ion current measurement on capacitive-coupled plasma

2001Review of Scientific Instruments

Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases

2018Plasma Physics and Controlled Fusion

External circuit integration with electromagnetic particle in cell modeling of plasma focus devices

2015Physics of Plasmas

Plasma density and ion energy control via driving frequency and applied voltage in a collisionless capacitively coupled plasma discharge

2018Physics of Plasmas