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Effect of radiofrequency bias power on transmission spectrum of flat-cutoff sensor in inductively coupled plasma

Hee-Jung Yeom, Gwang-Seok Chae, Min Young Yoon, Wooram Kim, Jae-Heon Lee, Jun-Hyung Park, Chan-Woo Park, Jung-Hyung Kim, Hyo-Chang Lee2024年9月Physics of PlasmasIF 2.2 出版社

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Inductively coupled plasma

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