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Experimental and simulation studies of E-H mode transitions in Cl2inductively coupled plasmasOpen Access

Xin-Jie Wang, Li-Yue Gong, Shi-Zhong Huang, Ming-Liang Zhao, Fei Gao, You-Nian Wang2025年10月Physics of PlasmasIF 2.2 出版社

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Inductively coupled plasma

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