AI要約装置ジャーナル ChatGPT About

© 2026 FUSIONPAPERS

About 法務情報

トップに戻る

rf‐excited molecular jet plasma for reactive ion etching

Joachim Janes, Norbert Lutz1991年Review of Scientific InstrumentsIF 1.6 出版社

この論文にはまだAI要約がありません。

関連論文

The plasma‐chemical reactions of several materials in a rf ion source

1990Review of Scientific Instruments

Plasma heating and generation of energetic D ions with the 3-ion ICRF + NBI scenario in mixed H-D plasmas at JET-ILW

2020Nuclear Fusion

Dynamic plasma screening effects on electron capture process in hydrogenic ion–fully stripped ion collisions in dense plasmas

1997Physics of Plasmas

A comparative study of dielectric barrier discharge plasma device and plasma jet to generate plasma activated water and post-discharge trapping of reactive species

2022Physics of Plasmas

Ion cyclotron heating and RF propagation in the Proto-Cleo stellarator

1983Nuclear Fusion

Fast ion transport by sawtooth instability in the presence of ICRF–NBI synergy in JET plasmas

2021Nuclear Fusion

Characterization of plasmas produced by laser–gas jet interaction

2001Physics of Plasmas

Overview of RF techniques in new confinement regimes with modified shear

1998Plasma Physics and Controlled Fusion

Application of fusion high-power RF techniques to the non-fusion field

1993Plasma Physics and Controlled Fusion

Doppler broadening of gamma ray lines and fast ion distribution in JET plasmas

2010Nuclear Fusion

rf‐excited molecular jet plasma for reactive ion etching — 核融合論文 — FusionPapers