Performance summary on a high power dense plasma focus x-ray lithography point source producing70nmline features inAlGaAsmicrocircuits
Rodney Petr, Alexander Bykanov, Jay Freshman, Dennis Reilly, Joseph Mangano, Maureen Roche, Jason Dickenson, Mitchell Burte, John Heaton2004年Review of Scientific InstrumentsIF 1.6出版社
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Performance summary on a high power dense plasma focus x-ray... — 核融合論文 — FusionPapers
