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Characterization of carbon nitride deposition fromCH4∕N2glow discharge plasma beams using optical emission spectroscopy

Wei Hu, Jun-Yi Tang, Jia-da Wu, Jian Sun, Yi-qun Shen, Xiao-feng Xu, Ning Xu2008年Physics of PlasmasIF 2.2 出版社

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Discharge plasma Emission spectroscopy Glow discharge

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