Self consistent radio-frequency wave propagation and peripheral direct current plasma biasing: Simplified three dimensional non-linear treatment in the “wide sheath” asymptotic regime
L. Colas, J. Jacquot, S. Heuraux, E. Faudot, K. Crombé, V. Kyrytsya, J. Hillairet, M. Goniche2012年Physics of PlasmasIF 2.2出版社
