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Development of a high-speed impedance measurement system for dual-frequency capacitive-coupled pulsed-plasma

Hohyoung Lee, Jeongbeom Lee, Gijung Park, Yunseok Han, Youngwook Lee, Gunhee Cho, Hanam Kim, Hongyoung Chang, Kyoungwook Min2015年Review of Scientific InstrumentsIF 1.6 出版社

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