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Spectroscopy diagnostic of dual-frequency capacitively coupled CHF3/Ar plasma

Wen-Yao Liu, Yong-Quan Du, Yong-Xin Liu, Jia Liu, Tian-Liang Zhao, Yong Xu, Xiao-Song Li, Ai-Min Zhu, You-Nian Wang2013年Physics of PlasmasIF 2.2 出版社

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Plasma diagnostics Capacitively coupled plasma

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