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Experimental investigation of ion energy distributions in a dual frequency capacitively coupledAr/CF4plasma

Zhi-Cheng Li, Da-Lei Chang, Xiao-Song Li, Zhen-Hua Bi, Wen-Qi Lu, Yong Xu, Ai-Min Zhu, You-Nian Wang2010年Physics of PlasmasIF 2.2 出版社

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Capacitively coupled plasma

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