FusionPapers
図版検索トレンドwiki日本の研究
© 2026 FUSIONPAPERS
About法務情報
トップに戻る

Experimental investigation of mode transitions in asymmetric capacitively coupled radio-frequency Ne and CF4plasmas

Gang-Hu Liu, Yong-Xin Liu, Li-Shui Bai, Kai Zhao, You-Nian Wang2018年Physics of PlasmasIF 2.2出版社

wiki

Capacitively coupled plasma
この論文にはまだAI要約がありません。

関連論文

Experimental investigation of ion energy distributions in a dual frequency capacitively coupledAr/CF4plasma

2010Physics of Plasmas

Numerical study of ion energy and angular distributions in dual‐frequency capacitively coupled CF4plasmas

2012Physics of Plasmas

Evolution of Discharge Structure in Capacitive Radio-Frequency Atmospheric Microplasmas

2006PHYSICAL REVIEW LETTERS

Analysis of optical emission spectroscopy in a dual-frequency capacitively coupledCHF3plasma

2009Physics of Plasmas

Capacitive and resistive double sheath model in an asymmetric radio frequency plasma discharge

2015Physics of Plasmas

Influence of finite geometrical asymmetry of the electrodes in capacitively coupled radio frequency plasma

2014Physics of Plasmas

Measurements of time average series resonance effect in capacitively coupled radio frequency discharge plasma

2011Physics of Plasmas

One-dimensional hybrid simulation of the dc/RF combined driven capacitively coupled CF4plasmas

2012Physics of Plasmas

An analytical model of multi-component radio frequency capacitively coupled plasma and experimental validation

2017Physics of Plasmas

Experimental investigation of an electronegative cylindrical capacitively coupled geometrically asymmetric plasma discharge with an axisymmetric magnetic field

2024Physics of Plasmas