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Absolute CF2density and gas temperature measurements by absorption spectroscopy in dual-frequency capacitively coupled CF4/Ar plasmas

Wen-Yao Liu, Yong Xu, Yong-Xin Liu, Fei Peng, Fa-Ping Gong, Xiao-Song Li, Ai-Min Zhu, You-Nian Wang2014年Physics of PlasmasIF 2.2 出版社

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Capacitively coupled plasma

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