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Experimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas

Partha Saikia, Heman Bhuyan, Seong Ling Yap, Miguel Escalona, Mario Favre, Edmund Wyndham, Julian Schulze2019年Physics of PlasmasIF 2.2 出版社

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Capacitively coupled plasma

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