図版検索トレンド wiki 日本の研究

© 2026 FUSIONPAPERS

About 法務情報

トップに戻る

Comparison of plasma excitation, ionization, and energy influx in single and dual frequency capacitive discharges

B. B. Sahu, Jeon G. Han2016年Physics of PlasmasIF 2.2 出版社

この論文にはまだAI要約がありません。

関連論文

On the self-excitation mechanisms of plasma series resonance oscillations in single- and multi-frequency capacitive discharges

2015Physics of Plasmas

Fundamental investigations of capacitive radio frequency plasmas: simulations and experiments

2012Plasma Physics and Controlled Fusion

Experimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas

2019Physics of Plasmas

Plasma density and ion energy control via driving frequency and applied voltage in a collisionless capacitively coupled plasma discharge

2018Physics of Plasmas

Electron heating in multiple-frequency capacitive discharges

2006Plasma Physics and Controlled Fusion

Numerical investigation of ion energy distribution and ion angle distribution in a dual-frequency capacitively coupled plasma with a hybrid model

2007Physics of Plasmas

Effects of gas pressure on 60/13.56 MHz dual-frequency capacitively coupled plasmas

2011Physics of Plasmas

Theoretical investigation of phase-controlled bias effect in capacitively coupled plasma discharges

2011Physics of Plasmas

Novel high-frequency energy-efficient pulsed-dc generator for capacitively coupled plasma discharge

2018Review of Scientific Instruments

Experimental investigations of the plasma radial uniformity in single and dual frequency capacitively coupled argon discharges

2016Physics of Plasmas