図版検索トレンド wiki 日本の研究

© 2026 FUSIONPAPERS

About 法務情報

トップに戻る

Novel high-frequency energy-efficient pulsed-dc generator for capacitively coupled plasma discharge

Md Abdullah Al Mamun, Hiroshi Furuta, Akimitsu Hatta2018年Review of Scientific InstrumentsIF 1.6 出版社

wiki

Capacitively coupled plasma

この論文にはまだAI要約がありません。

関連論文

Plasma density and ion energy control via driving frequency and applied voltage in a collisionless capacitively coupled plasma discharge

2018Physics of Plasmas

A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma

2015Physics of Plasmas

Development of a high-speed impedance measurement system for dual-frequency capacitive-coupled pulsed-plasma

2015Review of Scientific Instruments

Comparison of plasma excitation, ionization, and energy influx in single and dual frequency capacitive discharges

2016Physics of Plasmas

Measurements of time average series resonance effect in capacitively coupled radio frequency discharge plasma

2011Physics of Plasmas

Enhancement of Harmonic Heating by Magnetized Plasma Series Resonance in Capacitive Radio Frequency Discharges

2024PHYSICAL REVIEW LETTERS

The discharge condition to enhance electron density of capacitively coupled plasma with multi-holed electrode

2012Physics of Plasmas

Combined effects of gas pressure and exciting frequency on electron energy distribution functions in hydrogen capacitively coupled plasmas

2013Physics of Plasmas

Influence of exciting frequency on gas and ion rotational temperatures of nitrogen capacitively coupled plasma

2008Physics of Plasmas

Direct current dielectric barrier assistant discharge to get homogeneous plasma in capacitive coupled discharge

2014Physics of Plasmas