図版検索トレンド wiki 日本の研究

© 2026 FUSIONPAPERS

About 法務情報

トップに戻る

Kinetic interpretation of resonance phenomena in low pressure capacitively coupled radio frequency plasmas

Sebastian Wilczek, Jan Trieschmann, Denis Eremin, Ralf Peter Brinkmann, Julian Schulze, Edmund Schuengel, Aranka Derzsi, Ihor Korolov, Peter Hartmann, Zoltán Donkó, Thomas Mussenbrock2016年Physics of PlasmasIF 2.2 出版社

wiki

Capacitively coupled plasma

この論文にはまだAI要約がありません。

関連論文

Measurements of time average series resonance effect in capacitively coupled radio frequency discharge plasma

2011Physics of Plasmas

Kinetic investigation of the ion angular distribution in capacitive radio-frequency plasmas

2017Physics of Plasmas

Scale-invariant resonance characteristics in magnetized capacitive radio frequency plasmas

2023Physics of Plasmas

Enhancement of Harmonic Heating by Magnetized Plasma Series Resonance in Capacitive Radio Frequency Discharges

2024PHYSICAL REVIEW LETTERS

On the self-excitation mechanisms of plasma series resonance oscillations in single- and multi-frequency capacitive discharges

2015Physics of Plasmas

Comparison of atmospheric-pressure helium and argon plasmas generated by capacitively coupled radio-frequency discharge

2006Physics of Plasmas

Effects of gas pressure on 60/13.56 MHz dual-frequency capacitively coupled plasmas

2011Physics of Plasmas

Effect of driving frequency on the electron energy distribution function and electron-sheath interaction in a low pressure capacitively coupled plasma

2016Physics of Plasmas

Effect of driving voltages in dual capacitively coupled radio frequency plasma: A study by nonlinear global model

2015Physics of Plasmas

A time-dependent model of pulse-driven radio frequency capacitively coupled collisional plasma sheath

2017Physics of Plasmas