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Characterization of RF He-N2/Ar mixture plasma via Langmuir probe and optical emission spectroscopy techniques

Maria Younus, N. U. Rehman, M. Shafiq, S. S. Hussain, M. Zakaullah, M. Zaka-ul-Islam2016年Physics of PlasmasIF 2.2 出版社

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Langmuir probe Emission spectroscopy

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