Stable droplet generator for a high brightness laser produced plasma extreme ultraviolet source
A. Vinokhodov, M. Krivokorytov, Yu. Sidelnikov, V. Krivtsun, V. Medvedev, V. Bushuev, K. Koshelev, D. Glushkov, S. Ellwi2016年Review of Scientific InstrumentsIF 1.6出版社