図版検索トレンド wiki 日本の研究

© 2026 FUSIONPAPERS

About 法務情報

トップに戻る

The opposite pressure dependence of electron temperature with respect to O2/Ar mixing ratio in an inductively coupled plasma

Moo-Young Lee, Jiwon Jung, Tae-Woo Kim, Kyung-Hyun Kim, Deuk-Chul Kwon, Chin-Wook Chung2020年Physics of PlasmasIF 2.2 出版社

wiki

Inductively coupled plasma

この論文にはまだAI要約がありません。

関連論文

Power dependence of electron density at various pressures in inductively coupled plasmas

2014Physics of Plasmas

Effects of aspect ratio on electron loss mechanisms and plasma uniformity in cylindrical inductively coupled plasma

2020Physics of Plasmas

Non-monotonic behavior of electron temperature in argon inductively coupled plasma and its analysis via novel electron mean energy equation

2018Physics of Plasmas

Electron temperature control with grid bias in inductively coupled argon plasma

1999Physics of Plasmas

Effect of wall reflection on the determination of electron temperature by the line-ratio method in inductively coupled plasmas

2005Physics of Plasmas

Experimental and numerical investigations of the characteristics of electron density in O2/Ar pulsed planar-coil-driven inductively coupled plasmas

2021Physics of Plasmas

Influence of electron energy distribution on fluid models of a low-pressure inductively coupled plasma discharge

2022Physics of Plasmas

Electron energy distribution functions in low-pressure inductively coupled bounded plasmas

2006Physics of Plasmas

Effect of the RF bias on the plasma density in an argon inductively coupled plasma

2020Physics of Plasmas

Effect of antenna size on electron kinetics in inductively coupled plasmas

2013Physics of Plasmas