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Experimental and numerical investigations of the characteristics of electron density in O2/Ar pulsed planar-coil-driven inductively coupled plasmas

Wei Liu, Xiao-Kun Wang, Sha-Sha Song, Yong-Xin Liu, Fei Gao, You-Nian Wang, Yong-Tao Zhao2021年Physics of PlasmasIF 2.2 出版社

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Inductively coupled plasma

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