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Ion energy distributions driven by the ultra-low frequency electrical asymmetry effect in biased inductively coupled plasmasOpen Access

Dong-Sheng Zhang, De-Qi Wen, Ming-Liang Zhao, Fei Gao, Ying-Ying Zhang, You-Nian Wang2025年8月Physics of PlasmasIF 2.2 出版社

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Inductively coupled plasma

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