図版検索トレンド wiki 日本の研究

© 2026 FUSIONPAPERS

About 法務情報

トップに戻る

Investigation of neutral gas temperature in radio-frequency two-chamber inductively coupled plasmas with H2/Ar dischargesOpen Access

Shi-Bo Li, Si-Yu Xing, Fei Gao, You-Nian Wang2025年6月Physics of PlasmasIF 2.2 出版社

wiki

Inductively coupled plasma

この論文にはまだAI要約がありません。

関連論文

Discharge physics and atomic layer etching in Ar/C4F6inductively coupled plasmas with a radio frequency bias

2021Physics of Plasmas

Plasma and gas neutralisation of high energy H- and D- in an Argon plasma neutraliser

2024Fusion Engineering and Design

Comparison of atmospheric-pressure helium and argon plasmas generated by capacitively coupled radio-frequency discharge

2006Physics of Plasmas

Effects of impedance matching network on the discharge mode transitions in a radio-frequency inductively coupled plasma

2008Physics of Plasmas

The radio frequency magnetic field effect on electron heating in a low frequency inductively coupled plasma

2000Physics of Plasmas

Influence of oxygen traces on an atmospheric-pressure radio-frequency capacitive argon plasma discharge

2011Physics of Plasmas

The effects of neutral gas heating on H mode transition and maintenance currents in a 13.56 MHz planar coil inductively coupled plasma reactor

2012Physics of Plasmas

Effect of the RF bias on the plasma density in an argon inductively coupled plasma

2020Physics of Plasmas

Gas temperature equation in a high-frequency argon plasma column at low pressures

2002Physics of Plasmas

Erratum: “The effects of neutral gas heating on H mode transition and maintenance currents in a 13.56 MHz planar coil inductively coupled plasma reactor” [Phys. Plasmas 19, 093501 (2012)]

2012Physics of Plasmas