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Non-electrostatic diagnostics for ion beams and sputter effects

T Trottenberg, A Spethmann, J Rutscher, H Kersten2012年Plasma Physics and Controlled FusionIF 2.2出版社

This paper reports on novel non-electrostatic diagnostics for ion beams. A force measuring probe for determination of the momentum flux in a particle beam is presented, and results are compared with corresponding measurements by a calorimetric technique. The target chamber is operated in a pressure regime where charge-exchange collisions are important. It is highlighted that non-electrostatic methods are sensitive for ions as well as energetic neutral atoms. Further, a technique is demonstrated which allows a measurement of the momentum associated with sputtered target atoms and recoil beam particles.

日本語訳

本論文は、イオンビームに対する新規な非静電的診断法について報告する。粒子ビーム中の運動量フラックスを決定するための力測定プローブを提示し、その結果を熱量測定法による対応する測定値と比較する。ターゲットチャンバーは、電荷交換衝突が重要となる圧力領域で運転される。非静電的手法がイオンだけでなく高エネルギー中性原子に対しても感度を有することが強調される。さらに、スパッタされたターゲット原子および反跳ビーム粒子に関連する運動量の測定を可能にする手法が実証される。

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Plasma diagnosticsIon beams
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