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Morphologies of co-depositing W layer formed during He plasma irradiation

Shin Kajita, Shota Kawaguchi, Naoaki Yoshida, Noriyasu Ohno, Hirohiko Tanaka2018年被引用 23Nuclear FusionIF 3出版社

Tungsten (W) samples were exposed to helium (He) plasmas with precipitation of W particles. It was shown that visible large-scale fiberform nanostructures (LFNs) were formed on the surface. The height of the LFN increased exponentially with the irradiation time in the initial phase of the growth. The growth rate was totally different from that of the conventional W nanostructure (fuzz) growth by He plasma irradiation, where the thickness increased in proportion to the square root of time. The LFNs growth had a directionality in a millimeter global scale; the direction was always  ∼45–60 degree rotated in clockwise direction from the magnetic field. The plasma flow measured spectroscopically near the sample was found to significantly increase when inserting a negatively biased sample, and the growth direction of the LFN was consistent with the direction of the plasma flow. Moreover, highly porous fiberform nanostructures or cauliflower-like structures comprised the deposition layer even when the He incident ion energy was lower than the threshold energy of fuzz growth (20–30 eV).

日本語訳

タングステン(W)試料を、W粒子の析出を伴うヘリウム(He)プラズマに曝露した。表面に可視的な大規模ファイバーフォームナノ構造(LFNs)が形成されることが示された。LFNの高さは、成長初期段階において照射時間に対して指数関数的に増加した。その成長速度は、Heプラズマ照射による従来のWナノ構造(ファズ)成長(厚さが時間の平方根に比例して増加する)とは全く異なっていた。LFNの成長はミリメートル規模の大域的指向性を有しており、その方向は磁場から時計回りに常に約45〜60度回転した方向であった。試料近傍で分光的に測定されたプラズマ流は、負バイアスを印加した試料を挿入すると有意に増加することが見出され、LFNの成長方向はプラズマ流の方向と一致していた。さらに、He入射イオンエネルギーがファズ成長の閾値エネルギー(20〜30 eV)よりも低い場合でも、高多孔性のファイバーフォームナノ構造またはカリフラワー状構造が堆積層を構成していた。

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