13CH4 was injected through graphite and tungsten spherical limiters in reproducible TEXTOR discharges. These materials were chosen, as they represent the actual compromise for the plasma facing components in the ITER divertor. 13C was used in order to distinguish injected and intrinsic carbon in the layer deposited on the limiter surface. Shot-by-shot video recordings show a continuous growth of the deposit near the injection hole. A pronounced difference in the 13C deposition pattern on the graphite and tungsten limiters was observed. Post-mortem surface analysis showed that the ratios of the locally deposited to the injected amount of carbon are 4% for graphite and 0.3% for tungsten. The margins of the carbon layer deposited on tungsten are significantly steeper in comparison with the graphite limiter case. The large difference in the 13C deposition efficiency can be explained by direct reflection of carbon from tungsten and the enhanced sputtering of carbon on the tungsten substrate. Nucleation is suggested to be an important mechanism for carbon deposition on tungsten. Monte Carlo impurity transport calculations by the ERO code reproduce reasonably the experimental results for the graphite limiter.