A new technique for wall conditioning that will be especially useful for future larger superconducting tokamaks, such as ITER, has been successfully developed and encouraging resultshave been obtained. Solid carborane powder, which is non-toxic and non-explosive, was used.Pulsed RF plasma was produced by a non-Faraday shielding RF antenna with RF power of 10 kW. The ion temperature was about 2 keV with a toroidal magnetic field of 1.8 T and a pressure of 3 × 10-1 Pa. Energetic ions broke up the carborane molecules, and the resulting boron ions struck and were deposited onthe first wall. In comparison with glow discharge cleaning boronization, the B/C coating film showshigher adhesion, more uniformity and longer lifetime during plasma discharges. The plasma performancewas improved after ICRF boronization.