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Enhancing the conversion efficiency of extreme ultraviolet light sources using a 2 µm wavelength laser

Y Yuan, Y Y Ma, W P Wang, S J Chen, Y Cui, M Zi, X H Yang, G B Zhang, Y X Leng2022年Plasma Physics and Controlled FusionIF 2.2出版社

In this study, we use the FLASH radiation hydrodynamic code and the FLYCHK atomic code to investigate the energy conversion and spectra associated with laser–Sn target interactions with 1 and 2 µm wavelength lasers. We found that the conversion efficiency (CE) reached as much as 3.38% with the 2 µm laser, which is 1.48 percentage points higher than the 1 µm laser (CE = 1.9%). In addition, we analyzed the contribution of dominant ionization states to the emission spectrum for both lasers. We observed that the growths of the out-of-band emission eventually led to a broadening of the spectrum, resulting in a reduction of spectral purity for the 1 µm laser. By contrast, the emission main peaks were all centered near 13.5 nm for the 2 µm laser, which is beneficial for efficient emission of light with a 13.5 nm wavelength (relevant for nanolithographic applications).

日本語訳

本研究では、FLASH放射流体力学コードとFLYCHK原子コードを用いて、1μmおよび2μm波長のレーザーとスズターゲットの相互作用に伴うエネルギー変換とスペクトルを調査した。2μmレーザーでは変換効率(CE)が最大3.38%に達し、これは1μmレーザー(CE = 1.9%)より1.48ポイント高い値であることがわかった。さらに、両レーザーにおける発光スペクトルへの主要な電離状態の寄与を分析した。1μmレーザーでは、バンド外発光の増大が最終的にスペクトルのブロードニングをもたらし、スペクトル純度の低下を引き起こすことが観察された。対照的に、2μmレーザーでは発光のメインピークがすべて13.5nm付近に集中しており、これはナノリソグラフィー応用に適した13.5nm波長の効率的な光放射に有利である。

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