Measurements were performed on the EUV emissions from intrinsic impurities in OH and RF plasmas on the TEXTOR Tokamak. By using a pinhole viewing system, spatial and temporal profiles were produced with an MCP RETICON detector. Best resolution was 1 ms temporally and 1 cm spatially. Data are presented on the behavior of impurity (C, O, Fe) profiles at several stages in the discharge including just prior to major disruptions. A one-dimensional, time dependent transport model was used to simulate the impurity profiles. Also, the effect of ICRH input (27 MHz; 1 MW) on the impurity levels is discussed.