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Spatial and spectral characterization of a laser produced plasma source for extreme ultraviolet metrology

H. Legall, H. Stiel, U. Vogt, H. Schönnagel, P.-V. Nickles, J. Tümmler, F. Scholz, F. Scholze2004年Review of Scientific InstrumentsIF 1.6 出版社

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Laser-produced plasma Plasma source

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