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The study of helicon plasma source

Ting-Ting Miao, Hong-Wei Zhao, Zhan-Wen Liu, Yong Shang, Liang-Ting Sun, Xue-Zhen Zhang, Huan-Yu Zhao2010年Review of Scientific InstrumentsIF 1.6出版社

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Plasma sourceHelicon plasmaHelicon plasma source
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