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The parameters of electron cyclotron resonance/radio-frequency hybrid hydrogen plasma adjusted by substrate arrangements

H. Y. Zhou, L. Wang, X. D. Zhu, B. Ke, F. Ding, X. H. Wen, Y. N. Wang2010年Review of Scientific InstrumentsIF 1.6 出版社

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Cyclotron resonance Electron cyclotron resonance Hydrogen plasma

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