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Analysis of H atoms in a negative ion source plasma with the non-equilibrium electron energy distribution function

S. Koga, T. Shibata, R. Terasaki, N. Kameyama, A. Hatayama, M. Bacal, K. Tsumori2012年Review of Scientific InstrumentsIF 1.6 出版社

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Ion source Negative ion Negative ion source

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