FusionPapers
図版検索トレンドwiki日本の研究
© 2026 FUSIONPAPERS
About法務情報
トップに戻る

Optical emission diagnostics with electric probe measurements of inductively coupled Ar/O2/Ar-O2plasmas

T. H. Chung, Hae Ra Kang, Min Keun Bae2012年Physics of PlasmasIF 2.2出版社

wiki

Plasma diagnostics
この論文にはまだAI要約がありません。

関連論文

Comparison of various interpretation methods of the electric probe measurements in inductively coupled Ar and O2plasmas

2014Physics of Plasmas

Investigation on charged particles in inductively coupled Ar/O2plasmas: The role of Ar proportion

2022Physics of Plasmas

Characterization of an inductively coupled nitrogen-argon plasma by Langmuir probe combined with optical emission spectroscopy

2011Physics of Plasmas

Radial dependence diagnosis of inductively coupled Ar plasma based upon optical emission spectroscopic measurement with spectral reflectance compensation

2023Review of Scientific Instruments

Optical emission spectroscopy and imaging of low-pressure N2plasmas generated by intense fast-pulsed electron beams

2025Physics of Plasmas

Electron beam-generated Ar/N2plasmas: The effect of nitrogen addition on the brightest argon emission lines

2016Physics of Plasmas

Characterization of RF He-N2/Ar mixture plasma via Langmuir probe and optical emission spectroscopy techniques

2016Physics of Plasmas

Development of a probe-type optical absorption spectroscopic system for spatially resolved CF2density measurement in inductively coupled C4F8/Ar plasmas

2020Review of Scientific Instruments