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Influence of microwave driver coupling design on plasma density at Testbench for Ion sources Plasma Studies, a 2.45 GHz Electron Cyclotron Resonance Plasma Reactor

A. Megía-Macías, O. D. Cortázar, A. Vizcaíno-de-Julián2014年Review of Scientific InstrumentsIF 1.6 出版社

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Ion source Cyclotron resonance Electron cyclotron resonance

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