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Global model analysis of negative ion generation in low-pressure inductively coupled hydrogen plasmas with bi-Maxwellian electron energy distributions

Sung-Ryul Huh, Nam-Kyun Kim, Bong-Ki Jung, Kyoung-Jae Chung, Yong-Seok Hwang, Gon-Ho Kim2015年Physics of PlasmasIF 2.2 出版社

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Negative ion Hydrogen plasma

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