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Relationship between the discharge mode and the spatial oxygen plasma distribution in a large size ferrite inductively coupled plasmas

Hyun Jun Kim, Hye Ju Hwang, Dong Hwan Kim, Jeong Hee Cho, Hee Sun Chae, Chin-Wook Chung2015年Physics of PlasmasIF 2.2 出版社

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Inductively coupled plasma

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